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Nanoscale grating fabrication in a cleanroom
We are offering multiple projects in the cleanroom with focus on gratings for x-ray application, this includes lithography and etching.
If you would like to do a project in a cleanroom do not hesitate to contact us under: bryan.benz@psi.ch
The team headed by Prof. Stampanoni develops advanced imaging techniques at the synchrotron (SLS) and strives at the translation to medical devices in a multidisciplinary effort involving academia, industry and medical partners. Our micro-fabrication team produces X-ray optical components for different projects. We recently patented a new etching method of silicon substrates allowing to surpass the aspect ratio limit of conventional silicon etching used in chip-manufacturing technology by several orders of magnitude (see our publication about MacEtch). MacEtch is a very active field of research, from both fundamental and applications perspectives, it can achieve extreme aspect ratio in the order of 10’000:1 against the 100:1 of the industry standard of deep reactive ion etching by using the catalytic properties of a metal pattern. We are now targeting to engineer the catalyst properties by ad hoc design of its geometry and interfaces in order to improve the defects control during the etching and to achieve the high quality required for X-ray gratings. We are actively looking for help in this process, which includes the multiple steps of patterning and etching. This allows for multiple opportunities to help in the cleanroom. This work can be done in the lithographic process utilising interference lithography or electron beam lithography, in the preparation of the catalyst with plasma sources or in the final step of MacEtch (work with HF).
The Paul Scherrer Institute PSI is the largest research institute for natural and engineering sciences within Switzerland. We perform cutting-edge research in the fields of matter and materials, energy and environment and human health. By performing fundamental and applied research, we work on sustainable solutions for major challenges facing society, science and economy. PSI is committed to the training of future generations.
The team headed by Prof. Stampanoni develops advanced imaging techniques at the synchrotron (SLS) and strives at the translation to medical devices in a multidisciplinary effort involving academia, industry and medical partners. Our micro-fabrication team produces X-ray optical components for different projects. We recently patented a new etching method of silicon substrates allowing to surpass the aspect ratio limit of conventional silicon etching used in chip-manufacturing technology by several orders of magnitude (see our publication about MacEtch). MacEtch is a very active field of research, from both fundamental and applications perspectives, it can achieve extreme aspect ratio in the order of 10’000:1 against the 100:1 of the industry standard of deep reactive ion etching by using the catalytic properties of a metal pattern. We are now targeting to engineer the catalyst properties by ad hoc design of its geometry and interfaces in order to improve the defects control during the etching and to achieve the high quality required for X-ray gratings. We are actively looking for help in this process, which includes the multiple steps of patterning and etching. This allows for multiple opportunities to help in the cleanroom. This work can be done in the lithographic process utilising interference lithography or electron beam lithography, in the preparation of the catalyst with plasma sources or in the final step of MacEtch (work with HF). The Paul Scherrer Institute PSI is the largest research institute for natural and engineering sciences within Switzerland. We perform cutting-edge research in the fields of matter and materials, energy and environment and human health. By performing fundamental and applied research, we work on sustainable solutions for major challenges facing society, science and economy. PSI is committed to the training of future generations.
Help our efforts in creating nano-structures for various application, including as gratings for medical use. The goal is to help us progress in our project with cleanroom work and to attain experience in the various tools and processes that are part of the everyday work.
Help our efforts in creating nano-structures for various application, including as gratings for medical use. The goal is to help us progress in our project with cleanroom work and to attain experience in the various tools and processes that are part of the everyday work.
